Product Overview
Engineered specifically for microelectronic facilities, this HX-40FW semiconductor chiller delivers heavy-duty cooling capacity with rigorous temperature regulation. Acting as an advanced semiconductor air-cooled scroll chiller, it efficiently manages peak thermal loads from plasma etching, wafer diffusion, and photolithography equipment, preventing structural drift and wafer yield loss caused by thermal fluctuations. Built for 24/7 continuous operation in harsh industrial environments, it ensures the strict uptime demanded by modern cleanroom manufacturing.
Product advantages
Equipped with a multi-stage PID control loop, the unit achieves tight temperature stability to match critical fab thermal profiles and safeguard wafer integrity. Operating as a reliable precision temperature control system and chip manufacturing cooling equipment, it integrates dual-circuit scroll compressors to deliver rapid load response and favorable energy efficiency, preventing thermal clipping during heavy-duty cycles. Its corrosion-resistant, modular air-cooled architecture suits contamination-sensitive fab environments, offering low noise emissions, high MTBF, and simplified maintenance routines. As a robust 40HP workhorse, this HX-40FW industrial chiller effortlessly handles dynamic process tool cooling demands.
Item :
HX-FWProduct name :
40HP Air-Cooled Scroll Chiller for Semiconductor FabsCooling capacity :
3 ~ 200 kWRefrigerant :
R407C/R410A/R134AMOQ :
1 unitApplication :
This HX-40FW semiconductor chiller suits various chip production. It includes cools micro-etching tools to prevent distortion, maintains thermal equilibrium for lithography optics and provides constant-temperature loops for packaging and ATE floors.HX-FW Series Packaged Air-Cooled Industrial Chiller
Our HX-FW Series air-cooled chillers utilize ambient air as the cooling source to reliably chill water to your exact specifications. Featuring a built-in water tank and pump, this compact, plug-and-play system requires no external cooling tower, making it the ideal solution for precision manufacturing environments.
Featuring a box-type structure with an integrated water tank and circulating pump, this unit eliminates the need for complex cooling tower installations. It boasts a beautiful exterior, compact footprint, and makes installation and maintenance incredibly simple and convenient.
Available in single or multi-compressor configurations. The system automatically alternates compressor operation based on load changes, balancing running hours to significantly save energy during partial loads and extend the lifespan of the equipment.
Utilizes fully enclosed compressors and high-efficiency copper tube condensers/evaporators. Equipped with a comprehensive suite of safety protections and an intuitive LCD human-machine interface, ensuring low noise, stable performance, and easy real-time monitoring.
Product features of air-cooled chillers: The unit uses a fully enclosed compressor and electronic control components, equipped with a condenser and evaporator made of high-efficiency and high-quality copper tubes for heat exchange; Equipped with various safety protection devices, stable performance, low noise, long service life, and simple operation; Adopting a liquid crystal display human-machine interface, the operation is simple and convenient, and the operating status is clear at a glance; The model adopts a single compressor or a combination of multiple compressors for refrigeration system. The compressor can automatically alternate operation according to load changes, balancing the operating hours of each compressor, achieving the effect of saving energy consumption and extending the service life of the chiller unit. Easy to regulate energy and more energy-efficient at partial loads; The whole machine has a box type structure with a beautiful appearance and compact structure, which can be used to check the operation of the unit at any time; The unit can have its own water tank and circulating water pump according to the cooling capacity, without the need for a cooling tower or cooling water pump, making installation and maintenance simple and convenient.
| Parameter | HX-02FW | HX-03FW | HX-05FW | HX-06FW | HX-08FW | HX-10FW | HX-12FW | HX-15FW | HX-20FW | HX-25FW | HX-30FW | HX-40FW | HX-50FW | |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Cooling capacity (kW) | 5.4 | 8.1 | 13.5 | 16.2 | 21.6 | 27 | 32.4 | 40.5 | 54 | 67.5 | 81 | 108 | 135 | |
| Cooling capacity (Kcal/h) | 4644 | 6966 | 11610 | 13932 | 18576 | 23220 | 27864 | 34830 | 46440 | 58050 | 69660 | 92880 | 116100 | |
| Total power (kW) | 2.02 | 2.82 | 4.52 | 5.27 | 7.13 | 9.15 | 11 | 13.25 | 19 | 22.7 | 28.3 | 36.7 | 47 | |
| Running current (A) | 12 | 5.6 | 9 | 11 | 14 | 18 | 22 | 26 | 38 | 45 | 56 | 72 | 94 | |
| Power supply | Single Phase 220V 50Hz | 3 Phase 380V 50Hz | ||||||||||||
| Temp control range (℃) | 5-35 | |||||||||||||
| Temp control accuracy (℃) | ±1-2 | |||||||||||||
| Refrigerant | Type | R407C / R410A / R134A | ||||||||||||
| Filling amount (KG) | 1.6 | 1.8 | 2.8 | 3.2 | 4.4 | 5.6 | 6.8 | 8 | 12 | 15 | 18 | 22 | 28 | |
| Compressor | Way to control | Capillary | Thermal Balance Expansion Valve | |||||||||||
| Form | Scroll | |||||||||||||
| Power (kW) | 1.5*1 | 2.25*1 | 3.75*1 | 4.5*1 | 3.0*2 | 3.75*2 | 4.5*2 | 5.25*2 | 7.5*2 | 9.0*2 | 7.5*3 | 7.5*4 | 9.0*4 | |
| Frozen water | Tank volume (L) | 40 | 45 | 65 | 70 | 140 | 180 | 200 | 200 | 260 | 300 | 390 | 450 | 480 |
| Tank material | SUS304 stainless steel | |||||||||||||
| Pipe diameter | G1/2" | G1" | G1" | G1" | G1" | G1-1/2" | G1-1/2" | G1-1/2" | G2" | G2" | G2-1/2" | G2-1/2" | G3" | |
| Water pump | Head (m) | 20 | ||||||||||||
| Power (kW) | 0.37 | 0.37 | 0.37 | 0.37 | 0.55 | 0.75 | 0.75 | 1.1 | 2.2 | 2.2 | 3 | 3 | 4 | |
| Evaporator | Types of | Water tank coil type (shell and tube type) | ||||||||||||
| Water flow (m³/h) | 1 | 1.8 | 3 | 3.6 | 4.8 | 6 | 7.2 | 9 | 12 | 15 | 18 | 24 | 30 | |
| Condenser | Types of | Efficient copper tube plus aluminum foil fin type + external rotor cooling fan | ||||||||||||
| Air volume (m³/h) | 2200 | 3300 | 5500 | 6000 | 8500 | 11000 | 11000 | 16500 | 22000 | 27500 | 33000 | 44000 | 55000 | |
| Fan power (W) | 150 | 200 | 200*2 | 200*2 | 290*2 | 450*2 | 670*2 | 825*2 | 937*2 | 825*3 | 937*3 | 937*4 | 937*6 | |
| Safety Protection | Compressor overheating protection, overcurrent protection, high and low pressure protection, overtemperature protection, flow protection, phase sequence/phase loss protection, exhaust overheating protection, antifreeze protection. | |||||||||||||
| Dimensions | Long (mm) | 850 | 930 | 1100 | 1100 | 1350 | 1450 | 1550 | 1600 | 1900 | 2150 | 2400 | 2000 | 2500 |
| Width (mm) | 520 | 570 | 680 | 680 | 740 | 780 | 780 | 880 | 990 | 990 | 1100 | 1560 | 1780 | |
| High (mm) | 1100 | 1150 | 1350 | 1350 | 1450 | 1550 | 1600 | 1600 | 1875 | 1875 | 1930 | 1850 | 1900 | |
| Unit weight (KG) | 85 | 120 | 150 | 170 | 210 | 260 | 320 | 450 | 550 | 620 | 780 | 850 | 950 | |
Plug & Play |
Low Noise Design |
Intelligent Energy Saving |
Simple Maintenance |
Built-in Tank & Pump |
No Cooling Tower Needed |
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