Product Introduction
Engineered specifically for cleanroom environments, the HX-20SW semiconductor cooling equipment delivers precise thermal management for wafer fabrication and IC packaging lines. Utilizing an advanced water-cooled scroll chiller architecture alongside digital microcomputer regulation, this unit integrates seamlessly with critical semiconductor machinery and photolithography cooling systems, ensuring reliable heat rejection for high-duty-cycle electronic manufacturing equipment.
Product Advantages:
Precision Thermal Control: Advanced microcomputer controls maintain loop temperatures within a tight ±0.1°C tolerance, meeting stringent processing standards required by semiconductor machinery.
Thermodynamic Efficiency: Designed to leverage facility chilled water loops, this water-cooled scroll chiller optimizes heat transfer efficiency, reducing overall kWh consumption for facility operations.
Compact Cleanroom Footprint: Low-vibration orbital scroll architecture minimizes operational noise and structural stress, allowing versatile integration into space-constrained cleanroom sub-fab areas.
Fab-Grade Safety & Reliability: Built-in flow switches, dual pressure sensors, and thermal over-temperature shutoffs ensure our high-precision industrial chillers deliver 24/7 uninterrupted cooling protection.
Item :
HX-SWProduct name :
Water cooled vortex (piston) typeCooling capacity :
10 ~ 250kwRefrigerant :
（R407C/R410A/R134A）Environmentally FriendlyMOQ :
1 unitApplication :
Provides high-precision fluid cooling and temperature control for semiconductor etching, photolithography, packaging and testing, and R&D labs.Uncompromising Efficiency in Water-Cooled Scroll Chillers
Our industrial-grade water-cooled scroll chillers are engineered to meet versatile temperature control challenges, delivering reliable, low-noise, and energy-efficient cooling performance for a wide range of commercial and industrial applications. Featuring intelligent control, it utilizes a branded, fully hermetic scroll compressor. It offers numerous advantages, including high efficiency, low noise, minimal vibration, reliable operation, and a long service life.
Design applications incluce industrial refrigeratior plastic molding.electronic welding printing and packaging,textile printing and dyeing,electroplating and oxidation,commercial air conditioning
systems.
The unit has a compact structure,small fotprint, simple pipeline design,only requires extemal water pipes,and easy installation and maintenance. Intellgent contro,using brand fully enclosed vortex refigeration compressor. It has the advantages of high efficiency,low noise,small vibration,reliable operation,and long service life.
The microcomputer control system has powerul functions such as safety protection,communication,fault diagnos,and automatic adaptation. And provide multiple protection functions such as high and kow voltage protection,frozen water anti freezing and icing protection,power phase sequence protection,phase loss protection,insufficient water flow protection,compressor motor overheating,etc.
| Parameter | HX-05SW | HX-08SW | HX-10SW | HX-15SW | HX-20SW | HX-25SW | HX-30SW | HX-40SW | HX-50SW | |
|---|---|---|---|---|---|---|---|---|---|---|
| Cooling capacity (kW) | 15 | 24 | 30 | 45 | 60 | 75 | 90 | 120 | 150 | |
| Cooling capacity (Kcal/h) | 12900 | 20640 | 25800 | 38700 | 51600 | 64500 | 77400 | 103200 | 129000 | |
| Total power (kW) | 4.12 | 6.75 | 8.25 | 12.1 | 17.2 | 20.2 | 25.5 | 33 | 41 | |
| Running current (A) | 8 | 13 | 16 | 24 | 34 | 40 | 51 | 66 | 82 | |
| Power supply | 3 Phase 380V 50Hz | |||||||||
| Temp. control range (℃) | 5 ~ 35 | |||||||||
| Temp. control accuracy (℃) | ±1 ~ 2 | |||||||||
| Refrigerant | Type | (R407C/R410A/R134A) | ||||||||
| Filling amount (KG) | 3 | 4.8 | 6 | 8 | 12 | 14 | 18 | 24 | 30 | |
| Compressor | Throttling Device | Capillary | Thermal Balance Expansion Valve | |||||||
| Type | Scroll | |||||||||
| Power (kW) | 3.75 | 3.0*2 | 3.75*2 | 5.5*2 | 7.5*2 | 9.0*2 | 7.5*3 | 7.5*4 | 9.0*4 | |
| Chilled Water | Tank volume (L) | 65 | 140 | 180 | 200 | 260 | 280 | 390 | 450 | 500 |
| Tank material | SUS304 Stainless Steel | |||||||||
| Pipe diameter | G1" | G1-1/2" | G1-1/2" | G1-1/2" | G2" | G2" | G2-1/2" | G3" | G3" | |
| Water Pump | Pump Head (m) | 20 | 20 | 20 | 20 | 20 | 20 | 20 | 20 | 20 |
| Power (kW) | 0.37 | 0.55 | 0.75 | 1.1 | 2.2 | 2.2 | 3 | 3 | 4 | |
| Evaporator | Type | Water tank coil type (shell and tube type optional) | ||||||||
| Chilled water flow (m³/h) | 3 | 4.8 | 6 | 8 | 12 | 15 | 18 | 24 | 30 | |
| Condenser | Type | Shell and tube | ||||||||
| Cooling water flow (m³/h) | 3.5 | 5.6 | 7 | 11 | 14 | 18 | 21 | 24 | 35 | |
| Safety Protection | Compressor overheating protection, overcurrent protection, high and low pressure protection, overtemperature protection, flow protection, phase sequence/phase loss protection, exhaust overheating protection, antifreeze protection. | |||||||||
| Dimensions | Length (mm) | 950 | 950 | 1550 | 1550 | 1760 | 1760 | 1940 | 2200 | 2400 |
| Width (mm) | 650 | 650 | 750 | 750 | 750 | 750 | 900 | 950 | 950 | |
| Height (mm) | 1100 | 1100 | 1350 | 1350 | 1480 | 1480 | 1680 | 1700 | 1700 | |
| Unit weight (KG) | 130 | 190 | 260 | 350 | 440 | 520 | 650 | 750 | 850 | |
Wide Range of Cooling Capacity |
High Cost Efectineness |
Mature Technology |
Flexible Installation |
Efficient Heat Dissipation |
Comprehensive Safety |
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