Name: Semiconductor Precision Industrial Chiller
Availability: InStock

Semiconductor Precision Industrial Chiller

Product Description

Engineered for the semiconductor manufacturing sector, this industrial chiller equipment delivers high-precision temperature control systems and reliable process cooling machinery. Integrating advanced screw chiller technology and eco-friendly refrigerant products, it ensures exceptional energy efficiency under demanding production environments to fulfill chip-making thermal requirements.

Product Advantages

Designed specifically for the semiconductor sector, this industrial chiller equipment offers ±0.1℃ ultra-precise temperature control systems, perfectly matching cleanroom requirements. It features an energy-efficient screw chiller architecture powered by smart monitoring, significantly reducing operational costs. Utilizing superior refrigerant products and corrosion-resistant components, the unit guarantees long-term continuous operation, providing dependable process cooling machinery support for lithography and etching.

Item :
HX-SL (Single Screw)
Product name :
Water-Cooled Screw Chiller
Cooling capacity :
100 ~ 1200 kW
Refrigerant :
R407C Environmentally Friendly
MOQ :
1 unit
Application :
Wafer Fabrication,Lithography & Etching,Packaging & Testing and Gas Purification

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High Efficiency & Reliable Performance

Utilizing branded single-screw compressors, our chillers are designed for peak mechanical reliability and continuous 24/7 operation. The system effectively handles massive thermal loads with fewer moving parts, ensuring low noise levels, minimal vibration, and long-term operational cost savings.

System-Enhancing Design Characteristics

Featuring high-efficiency shell-and-tube heat exchangers and advanced electronic or thermal expansion devices, our chillers adapt flexibly to precise process demands from metallurgy to semiconductors. The compact, small-footprint structure optimizes factory floor utilization while maintaining superior thermal capacity.

Intelligent & Simplified Operation

Equipped with a smart PLC control system, the unit provides real-time monitoring and comprehensive safety protection logic. The user-friendly interface facilitates automated operation, while the robust design allows for simplified maintenance and drastic energy savings across various industrial fields.

Specifications

Model			HX-30SL	HX-40SL	HX-50SL	HX-60SL	HX-70SL	HX-80SL	HX-90SL	HX-100SL	HX-120SL	HX-130SL	HX-150SL
Cooling capacity		kW	96.4	133.2	174.8	187.8	233.3	251.3	296.1	348.3	375.1	407.9	495.3
Cooling capacity		Kcal/h	82904	114552	150328	161508	200638	216118	254646	299538	322586	350794	425958
Total power		kW	23.3	30.8	38.6	42.5	51	55.6	63.1	73.2	79.4	87.5	104.8
Running current		A	40.3	53.3	68.1	73.7	87.4	94.8	109.6	127.8	138.4	154.4	179.4
Power supply			3 Phase 380V 50Hz
Temperature control range		℃	5℃-35℃
Temperature control accuracy		℃	±2
Refrigerant	Type		R407C
	Filling amount	kg	15	20	25	30	35	40	45	50	60	65	75
	Way to control		Thermal Balance Expansion Valve
Compressor	Start up		Star-Delta Start
	Energy regulation	%	0%-25%-50%-75%-100% (0%-33%-66%-100%)
	Form		Semi-hermetic screw compressor
	Power	kW	23.3	30.8	38.6	42.5	51	55.6	63.1	73.2	79.4	87.5	104.8
Evaporator	Types of		Shell and tube
	Chilled water flow	m³/h	18	24	30	36	42	48	54	60	72	78	90
	Pipe diameter		PT 2-1/2"	PT 3"					PT 4"			PT 5"
Condenser	Types of		Shell and tube
	Cooling water flow	m³/h	22	28	35	42	49	56	63	72	84	92	105
	Pipe diameter		PT 2-1/2"	PT 3"					PT 4"			PT 5"
Safety protection			Compressor overheating protection, overcurrent protection, high and low pressure protection, overtemperature protection, flow protection, phase sequence/phase loss protection, exhaust overheating protection, antifreeze protection.
Dimensions	Length	mm	2200	2400	2500	2700	2800	2800	3000	3200	3400	3600	3600
	Width	mm	950	950	1000	1000	1100	1200	1250	1250	1250	1300	1400
	Height	mm	1450	1450	1500	1500	1550	1600	1650	1650	1650	1700	1750
Unit weight		KG	1030	1200	1380	1520	1650	1800	1730	1800	1900	1980	2100